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| AC Drive Level | 10mV - 2Vrms |
| Output Impedance | 25Ω, 100Ω |
| Max. Frequency | 5MHz |
| Frequency range | 10Hz to 5MHz |
| Frequency resolution | 100mHz, 6-digits of setting |
| Frequency output accuracy | ±0.01% |
| Test speed | <3ms (fastest) |
| Measurement mode | Meter Mode, List Mode, Sweep Mode, Equivalent Circuit Analysis |
| Built In Dc Bias | -12 to +12V, 0.3% ±1.5mV, 100Hz to 50MHz |
| Interfaces | RS-232 / Handler / LAN / USB Host / USB Device / EXT. I/O (standard); GPIB optional (OP-663201) |
| Power supply | 100 to 240 Vac, 50 to 60 Hz |
| Power consumption | 30 VA |
| Weight | 3.95 |
| Dimensions | 358 × 148 × 343 |
| Software | optional |
| Basic accuracy | ±0.08% (typical ±0.05%) |
| Equivalent circuit analysis | Yes |
